Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform

Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform

The increase in frequency spectrum for wireless communication system has led to the growing interest in thin film electroacoustic technology that scales favorably upon miniaturization. Non-ferroelectric piezoelectric thin films such as Zinc Oxide is one of the most promising material for Complementa...

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Bibliographic Details
Main Authors: Md Ralib, Aliza Aini, Mortada, Ossama, Orlianges, Jean Christophe, Crunteanu, Aurelian, Chatras, Matthieu, Nordin, Anis Nurashikin
Format: Article
Language:English
English
English
Published: Springer New York LLC 2017
Subjects:
TA Engineering (General). Civil engineering (General)
TJ Mechanical engineering and machinery
Online Access:http://irep.iium.edu.my/57290/
http://irep.iium.edu.my/57290/1/57290_Enhanced%20piezoelectric.pdf
http://irep.iium.edu.my/57290/2/57290_Enhanced%20piezoelectric_WOS.pdf
http://irep.iium.edu.my/57290/3/57290_Enhanced%20piezoelectric_SCOPUS_new.pdf

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