Effect of the flash annealing on the impurity distribution and the electronic structure in the inversion layer

QR Code

Effect of the flash annealing on the impurity distribution and the electronic structure in the inversion layer

We investigated the relationship among the number of flash annealing times to obtain Si clean surface and the change of arsenic dopant concentration and subband levels using secondary ion mass spectroscopy (SIMS) and angle-resolved photoelectron spectroscopy(ARPES). The SIMS result shows that the...

Full description

Bibliographic Details
Main Authors:	Sakata, Tomohiro, Takeda, Sakura Nishino., Ayob, Nur Idayu, Daimon, Hiroshi
Format:	Article
Language:	English English
Published:	Surface Science Society of Japan 2015
Subjects:	QC Physics T Technology (General)
Online Access:	http://irep.iium.edu.my/56960/ http://irep.iium.edu.my/56960/1/56960_Effect%20of%20the%20Flash%20Annealing%20on%20the%20Impurity%20_article.pdf http://irep.iium.edu.my/56960/2/56960_Effect%20of%20the%20Flash%20Annealing%20on%20the%20Impurity%20_scopus.pdf

Similar Items

Unusual energy separation of subbands in Si(111) p-channels induced by In adsorption
by: Ayob, Nur Idayu, et al.
Published: (2015)

Role of NH3 Annealing Treatment in Improving SeN Layer on GaAs Substrate Using Electron Beam Evaporator
by: Alvin, Y. S. M., et al.
Published: (2015)

Optimization of Post-Annealing Treatment Conditions on GaN Layer Grown on m-Plane Sapphire Substrate by Electron Beam Evaporator
by: Ariff, A., et al.
Published: (2015)

Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon
by: Lee, W. P., et al.
Published: (2004)

Improving Physical Properties of Nano Layered ITO Thin Films by using a Novel Oil Thermal Annealing
by: Hegde, Gurumurthy, et al.
Published: (2014)

Optical absorption in annealed tin sulphide thin films
by: Sakrani, Samsudi, et al.
Published: (1994)

Optimization of Post-Annealing NH3 Temperature for GaN Growth on GaAs (100) Substrate via Electron Beam Evaporator
by: Taib, M. lkram Md, et al.
Published: (2015)

Phonon scattering by impurities in semiconductors
by: Ramdane, Abderrahim
Published: (1980)

Molecular Dynamics Studies Of The Annealing Of Carbon Peapods
by: Lee, Thong Yan
Published: (2018)

Camera flash heating of a three-layer solid composite: an approximate solution
by: Jibrin, Sani, et al.
Published: (2013)

Optimising the space utilisation in real-time flash translation layer mapping scheme
by: Ab. Karim, Mohd Bazli, et al.
Published: (2018)

Impurity removal from petroleum coke
by: Gagnon, A., et al.
Published: (2016)

The role of impurities and additives in the crystallisation of gypsum
by: Muryanto, Stefanus
Published: (2002)

Magnesium Impurities Decide the Structure of Calcium Carbonate Hemihydrate
by: Aufort, Julie, et al.
Published: (2020)

The Effect Of Substrate Temperature And Annealing On The Photoresponse Of Zno Uv Sensor
by: Ahmad, Halim
Published: (2013)

Effects of Post Annealing Treatment on the Characteristics of Ohmic Contacts on n-type AIGaN
by: Hassan, Z., et al.
Published: (2005)

Effects Of Thermal Annealing Of Pt Schottky Contacts On n-GaN.
by: C, W Chin, et al.
Published: (2007)

Inversion for the Elastic Parameters of Layered Transversely Isotropic Media
by: Li, Ruiping
Published: (2002)

Vibrational Spectroscopic Studies into Impurities in Ionic Liquids
by: Maxwell-Hogg, Steven
Published: (2019)

Impurity rejection in the nickel laterite leach system
by: Wang, Kai
Published: (2012)

Hybrid membrane to remove impurities in waste water
by: Noor Asyikin, Ahmad Shuhaimi
Published: (2010)

Distribution of the synchronous flashing beetle, Pteroptyx tener olivier (Coleoptera: lampyridae), in Malaysia.
by: Wan Jusoh, Wan Faridah Akmal, et al.
Published: (2013)

The FLASH project: improving the tools for flash flood monitoring and prediction across the United States
by: Gourley, Jonathan J., et al.
Published: (2017)

Anomaly-Based Detection Approach To Detect The Flash Crowd Attack During The Flash Event
by: Al-Saleem, Samer Abdulsada Mutlag
Published: (2017)

Photoelectrochemical Activity Of Magnetron Sputtered ZnO Thin Films: Role Of Thermal Annealing
by: Almamari, M. R., et al.
Published: (2020)

Effect Of Annealing Temperature On Cerium Oxide Thin Films Grown By DC Sputtering Method
by: Ainita Rozati Mohd, Zabidi, et al.
Published: (2020)

Effect Of Annealing Temperature On Cerium Oxide Thin Films Grown By Dc Sputtering Method
by: Zabidi, Ainita Rozati Mohd, et al.
Published: (2020)

Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering
by: Bashir, Umar, et al.
Published: (2016)

Electric field changes generated by the preliminary breakdown for the negative cloud-to-ground lightning flashes in Malaysia and Sweden
by: Baharudin, Zikri Abadi
Published: (2012)

Phase-imprinting of Bose-Einstein condensates with Rydberg impurities
by: Mukherjee, Rick, et al.
Published: (2015)

Quantum estimation of impurity effect for KDP crystal growth
by: Asakuma, Y., et al.
Published: (2008)

Defects and impurities in jarosite: A computer simulation study
by: Wright, Kathleen, et al.
Published: (2006)

Transition of electron transport process in Be-doped low-temperature-grown GaAs layer
by: Mohamed, Mohd Ambri, et al.
Published: (2013)

Effect of static electric field on the beat structures in four-wave mixing signals from semiconductor microcavities
by: , Suryadi, et al.
Published: (2002)

Cross-gradient Joint Inversion Of 2d Resistivity And Seismic Refraction Methods
by: Abdullah Sanusi, Nabilah Husna
Published: (2021)

Characteristics Of Titanium Dioxide Nanotubes Annealed Under Various Conditions And Quenched Using Liquid Nitrogen
by: Kai, Ti Low, et al.
Published: (2020)

Effect Of Varying Thermal Annealing Temperature On The Characteristics Of Lower And Higher Mg-DOPED GaN
by: Hanafiah, A. M., et al.
Published: (2019)

Correlation between Electronic Structure and Electron Conductivity in MoX2 X = S, Se, Te)
by: Saifful Kamaluddin, Muzakir
Published: (2016)

Electronic structure simulation of gallium arsenide clusters
by: Musa, Nor Muniroh
Published: (2009)

Structural properties dependence on annealing temperature of 1-D lanthanum iron garnet nanofiber prepared via electrospinning technique
by: Mohamad Ashry, Jusoh, et al.
Published: (2019)