Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

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Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator

This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin
Format:	Proceeding Paper
Language:	English English
Published:	IEEE 2016
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf

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