Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS ap...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
IEEE
2016
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf |
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| author | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin |
| author_facet | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin |
| author_sort | Md Ralib @ Md Raghib, Aliza 'Aini |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper addresses the investigation of acoustic
wavelength effects on silicon compatible SAW resonator based on
Al doped ZnO thin film. Three different resonators at acoustic
wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL
Multiphysics. The device is fabricated using post CMOS approach
namely deposition of 3.78 m thickness of Al doped Zinc Oxide
(AZO) thin film, photolithography and wet etching. S-parameter
measurements shows the series resonance frequency occurred at
1.156 GHz, 1.098 GHz and 0.966 GHz for three different
wavelength respectively. The influence of acoustic wavelength on
resonance frequency, acoustic wave velocity and
electromechanical coupling coefficient were discussed. The best
transmission characteristic was observed by Resonator 3 due to
highest coupling coefficient of 0.069% and lowest insertion loss of
40.5 dB. The range of extracted SAW velocity is between 4161 m/s
to 4497 m/s. Hence, the measurement results are consistent with
finite element simulation results with deviation less than 5% in
terms of resonance frequency and acoustic wave velocity. |
| first_indexed | 2025-11-14T16:37:18Z |
| format | Proceeding Paper |
| id | iium-54613 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T16:37:18Z |
| publishDate | 2016 |
| publisher | IEEE |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-546132017-05-23T07:57:52Z http://irep.iium.edu.my/54613/ Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin TK7885 Computer engineering This paper addresses the investigation of acoustic wavelength effects on silicon compatible SAW resonator based on Al doped ZnO thin film. Three different resonators at acoustic wavelength of 3.2, 3.6 and 4.8 m were simulated using COMSOL Multiphysics. The device is fabricated using post CMOS approach namely deposition of 3.78 m thickness of Al doped Zinc Oxide (AZO) thin film, photolithography and wet etching. S-parameter measurements shows the series resonance frequency occurred at 1.156 GHz, 1.098 GHz and 0.966 GHz for three different wavelength respectively. The influence of acoustic wavelength on resonance frequency, acoustic wave velocity and electromechanical coupling coefficient were discussed. The best transmission characteristic was observed by Resonator 3 due to highest coupling coefficient of 0.069% and lowest insertion loss of 40.5 dB. The range of extracted SAW velocity is between 4161 m/s to 4497 m/s. Hence, the measurement results are consistent with finite element simulation results with deviation less than 5% in terms of resonance frequency and acoustic wave velocity. IEEE 2016 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf application/pdf en http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin (2016) Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator. In: 6th International Conference on Computer and Communication Engineering (ICCCE 2016), 25th-27th July 2016, Kuala Lumpur. http://ieeexplore.ieee.org/abstract/document/7808371/ 10.1109/ICCCE.2016.113 |
| spellingShingle | TK7885 Computer engineering Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title | Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title_full | Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title_fullStr | Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title_full_unstemmed | Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title_short | Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator |
| title_sort | investigation of acoustic wavelength effects on silicon compatible al doped zno saw resonator |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/ http://irep.iium.edu.my/54613/9/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects.pdf http://irep.iium.edu.my/54613/8/54613_Investigation%20of%20Acoustic%20Wavelength%20Effects_Scopus.pdf |