Design and simulation of MEMS helmholtz resonator for acoustic energy harvester

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Design and simulation of MEMS helmholtz resonator for acoustic energy harvester

An acoustic energy harvester using Helmholtz resonator with piezoelectric circular diaphragm has been studied using COMSOL Multiphysics 5.1. In this paper, multiple designs considerations for MEMS Helmholtz resonator and piezoelectric circular diaphragm including the length and radius of the tu...

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Bibliographic Details
Main Authors:	Johari, Muhammad Jabrullah, Ab Rahim, Rosminazuin
Format:	Proceeding Paper
Language:	English English
Published:	IEEE 2016
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/54518/ http://irep.iium.edu.my/54518/1/54518.pdf http://irep.iium.edu.my/54518/2/54518_Design%20and%20Simulation%20of%20MEMS%20Helmholtz%20Resonator%20for%20Acoustic%20Energy%20Harvester_SCOPUS.pdf

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