Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch

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Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch

Dielectric charges cause stiction problems in most capacitive RF-MEMS switches, creating a major reliability issue during production. A new method based on finite-element- method simulation is developed in this paper to analyze the dielectric charging effect on the RF-MEMS switch’s pull voltages (na...

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Bibliographic Details
Main Authors:	Ma, Li Ya, Soin, Norhayati, Nordin, Anis Nurashikin
Format:	Proceeding Paper
Language:	English English
Published:	2016
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/52755/ http://irep.iium.edu.my/52755/8/52755-new.pdf http://irep.iium.edu.my/52755/9/52755-Theoretical%20and%20simulated%20investigation%20of%20dielectric%20charging%20effect%20on%20a%20capacitive%20RF-MEMS%20switch_SCOPUS.pdf

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