Tracking control of a nanopositioner using complementary sensors

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Tracking control of a nanopositioner using complementary sensors

Piezoelectric tube actuators are widely used in atomic force and scanning tunneling microscopy (STM) for nanoscale positioning. There has been a consistent effort to increase the scan speed of these actuators using feedback control techniques. A feedback controller requires a measurement of the scan...

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Bibliographic Details
Main Authors:	Mahmood, Iskandar Al-Thani, Moheimani, S.O. Reza, Liu, Kexiu
Format:	Article
Language:	English
Published:	Institute of Electrical and Electronics Engineers (IEEE) 2009
Subjects:	Q Science (General) TJ212 Control engineering
Online Access:	http://irep.iium.edu.my/5210/ http://irep.iium.edu.my/5210/1/Tracking_Control_of_a_Nanopositioner_Using_Complementary_Sensors.pdf

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