Parametric study of sputtering microchannels via focused ion beam (FIB)

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Parametric study of sputtering microchannels via focused ion beam (FIB)

Focused ion beams (FIB) are used in microfabrication and have certain advantages compared to photolithography and other micromachining technologies. The main advantage is that it can be used for direct writing/patterning of the target material. FIB can create a variety of geometric features, has the...

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Bibliographic Details
Main Authors:	Mohd Shahar, Siti Fatimah, Jaafar, Israd Hakim, Ali, Mohammad Yeakub
Format:	Article
Language:	English English
Published:	Asian Research Publishing Network (ARPN) 2015
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/50752/ http://irep.iium.edu.my/50752/1/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29.pdf http://irep.iium.edu.my/50752/2/50752_Parametric_study_of_sputtering_microchannels_via_focused_ion_beam_%28FIB%29_SCOPUS.pdf

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