Mechanical behavior of an electrostatically actuated micropump
We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the e...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2002
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/3/49864-new.pdf |
| _version_ | 1848783529435987968 |
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| author | Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. |
| author_facet | Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. |
| author_sort | Faris, Waleed Fekry |
| building | IIUM Repository |
| collection | Online Access |
| description | We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the equilibrium position is also solved numerically for the natural frequencies and mode shapes. The results generated by our model are in good qualitative agreement with reported results for the free vibration of straight annular plates. Moreover, the relation between the maximum deflection and the intensity of the electrostatic potential is in qualitative agreement with the experimental results for micropumps with a square actuating member. The model predicts the deflection accurately for any voltage up to the pull-in voltage. |
| first_indexed | 2025-11-14T16:22:48Z |
| format | Proceeding Paper |
| id | iium-49864 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T16:22:48Z |
| publishDate | 2002 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-498642016-04-15T07:39:32Z http://irep.iium.edu.my/49864/ Mechanical behavior of an electrostatically actuated micropump Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General) We present a model of an electrostatically actuated micropump employing an annular actuating member. The boundary-value problem describing the static deflection of the plate under the electrostatic force is solved numerically. The eigenvalue problem describing the vibration of the plate around the equilibrium position is also solved numerically for the natural frequencies and mode shapes. The results generated by our model are in good qualitative agreement with reported results for the free vibration of straight annular plates. Moreover, the relation between the maximum deflection and the intensity of the electrostatic potential is in qualitative agreement with the experimental results for micropumps with a square actuating member. The model predicts the deflection accurately for any voltage up to the pull-in voltage. 2002-04 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/49864/3/49864-new.pdf Faris, Waleed Fekry and Abdel-Rahman, Eihab M. and Nayfeh, Ali H. (2002) Mechanical behavior of an electrostatically actuated micropump. In: 43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, 22nd-25th April 2002, Denver, Colorado. http://dx.doi.org/10.2514/6.2002-1303 doi:10.2514/6.2002-1303 |
| spellingShingle | T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General) Faris, Waleed Fekry Abdel-Rahman, Eihab M. Nayfeh, Ali H. Mechanical behavior of an electrostatically actuated micropump |
| title | Mechanical behavior of an electrostatically actuated micropump |
| title_full | Mechanical behavior of an electrostatically actuated micropump |
| title_fullStr | Mechanical behavior of an electrostatically actuated micropump |
| title_full_unstemmed | Mechanical behavior of an electrostatically actuated micropump |
| title_short | Mechanical behavior of an electrostatically actuated micropump |
| title_sort | mechanical behavior of an electrostatically actuated micropump |
| topic | T Technology (General) T351 Mechanical drawing. Engineering graphics TJ Mechanical engineering and machinery TJ181 Mechanical movements TJ210.2 Mechanical devices and figures. Automata. Ingenious mechanism. Robots (General) |
| url | http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/ http://irep.iium.edu.my/49864/3/49864-new.pdf |