Design and simulation of Clamped-Clamped and Clamped-Free resonators

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Design and simulation of Clamped-Clamped and Clamped-Free resonators

To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonator...

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Bibliographic Details
Main Authors:	Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Pandian, Mohanraj Saundara, Khan, Sheroz
Format:	Proceeding Paper
Language:	English English
Published:	Institute of Electrical and Electronics Engineers, Inc, 2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf

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