Design and simulation of Clamped-Clamped and Clamped-Free resonators
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonator...
| Main Authors: | , , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
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Institute of Electrical and Electronics Engineers, Inc,
2013
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| Online Access: | http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf |
| _version_ | 1848783485801594880 |
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| author | Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz |
| author_facet | Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz |
| author_sort | Zainuddin, Ahmad Anwar |
| building | IIUM Repository |
| collection | Online Access |
| description | To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonators provide on-chip low cost solutions for devices with much reduced chip area, besides having considerably reduced insertion losses due to nonexistent external bond wires. They can be integrated with amplifiers to form oscillators for generating clocks in the 2MHz and 20MHz range. The resonators require DC voltage maximally 10V for Clamped-Clamped and 7V for Clamped-free and 100mV AC voltage to electrostatically actuate the resonator's beams. The actuation is simulated and measured using Finite Element modeling software of COMSOL to obtain optimum design parameters. This paper makes a comparative review of different models for evaluating the designed resonator's performance in terms of resonance frequency under given pull-in voltage, and appropriate displacement. |
| first_indexed | 2025-11-14T16:22:06Z |
| format | Proceeding Paper |
| id | iium-49603 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T16:22:06Z |
| publishDate | 2013 |
| publisher | Institute of Electrical and Electronics Engineers, Inc, |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-496032016-05-17T01:45:44Z http://irep.iium.edu.my/49603/ Design and simulation of Clamped-Clamped and Clamped-Free resonators Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the design of Clamped-Clamped (CC) and Clamped-Free (CF) beam resonators. These resonators provide on-chip low cost solutions for devices with much reduced chip area, besides having considerably reduced insertion losses due to nonexistent external bond wires. They can be integrated with amplifiers to form oscillators for generating clocks in the 2MHz and 20MHz range. The resonators require DC voltage maximally 10V for Clamped-Clamped and 7V for Clamped-free and 100mV AC voltage to electrostatically actuate the resonator's beams. The actuation is simulated and measured using Finite Element modeling software of COMSOL to obtain optimum design parameters. This paper makes a comparative review of different models for evaluating the designed resonator's performance in terms of resonance frequency under given pull-in voltage, and appropriate displacement. Institute of Electrical and Electronics Engineers, Inc, 2013 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/49603/1/49603.pdf application/pdf en http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Pandian, Mohanraj Saundara and Khan, Sheroz (2013) Design and simulation of Clamped-Clamped and Clamped-Free resonators. In: 2013 5th Asia Symposium on Quality Electronic Design (ASQED), 26th-28th-Aug. 2013, Penang. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6643564&tag=1 10.1109/ASQED.2013.6643564 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Pandian, Mohanraj Saundara Khan, Sheroz Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title | Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title_full | Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title_fullStr | Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title_full_unstemmed | Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title_short | Design and simulation of Clamped-Clamped and Clamped-Free resonators |
| title_sort | design and simulation of clamped-clamped and clamped-free resonators |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/ http://irep.iium.edu.my/49603/1/49603.pdf http://irep.iium.edu.my/49603/2/49603_Design_and_Simulation_of_Clamped-Clamped_and_SCOPUS.pdf |