Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators

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Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators

We present the design and analysis result of a low power, low noise, 20 MHz CMOS-MEMS oscillators. To perform oscillator circuit simulations, the CMOS-MEMS resonator (Clamped-Clamped beam) was modeled using its RLC equivalent circuits. For a MEMS resonator to be able to function as an oscillator it...

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Bibliographic Details
Main Authors:	Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin, Pandian, Monharaj Soundara, Khan, Sheroz
Format:	Proceeding Paper
Language:	English
Published:	IEEE 2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/49602/ http://irep.iium.edu.my/49602/1/49602.pdf

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