A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

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A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application

This present work reports on the study of controllable aluminium doped zinc oxide (AZO) patterning by chemical etching for MEMS application. The AZO thin film was prepared by RF magnetron sputtering as it is capable of producing uniform thin film at high deposition rates. X-Ray diffraction (XRD) and...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, A. Malik, Noreha, Othman, Raihan, Alam, A. H. M. Zahirul, Khan, Sheroz, Mortada, Ossama, Crunteanu, Aurelian, Chatras, Matthieu, Orlianges, Jean Christophe, Blondy, Pierre
Format:	Article
Language:	English English English
Published:	Springer Berlin Heidelberg 2017
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/49259/ http://irep.iium.edu.my/49259/1/Microsystems_2016.pdf http://irep.iium.edu.my/49259/9/49259_A%20study%20on%20controllable%20aluminium_scopus.pdf http://irep.iium.edu.my/49259/14/49259_A%20study%20on%20controllable%20aluminium%20doped_article.pdf

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