Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure
The performance of surface acoustic wave resonator in CMOS technology for single and double electrode (IDT) structure is presented. Interdigitated electrodes (IDT) structure in surface acoustic wave (SAW) resonator is the most crucial component for excitation of SAW devices. Possible configurations...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/46638/ http://irep.iium.edu.my/46638/1/46638.pdf |
| _version_ | 1848783003115847680 |
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| author | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Hashim, Uda |
| author_facet | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Hashim, Uda |
| author_sort | Md Ralib @ Md Raghib, Aliza 'Aini |
| building | IIUM Repository |
| collection | Online Access |
| description | The performance of surface acoustic wave resonator in CMOS technology for single and double electrode (IDT) structure is presented. Interdigitated electrodes (IDT) structure in surface acoustic wave (SAW) resonator is the most crucial component for excitation of SAW devices. Possible configurations for the IDT are single electrode and double electrode. The performance of the resonator for single and double electrode is compared at a frequency range of 0.5 GHz to 1 GHz. 2D Finite element modeling of the CMOS SAW resonator was simulated using COMSOL Multiphysics® for three step analysis eigen frequency, frequency domain and time domain analysis. The structure and dimension of the device is based on 0.18 μm RF CMOS process where the pattern of IDT is fabricated using standard CMOS fabrication process. The simulated results shows high quality factor in the order of thousands for double electrode CMOS SAW resonator compared to single electrode CMOS SAW resonator. |
| first_indexed | 2025-11-14T16:14:26Z |
| format | Proceeding Paper |
| id | iium-46638 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T16:14:26Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-466382016-04-15T09:34:42Z http://irep.iium.edu.my/46638/ Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Hashim, Uda TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices The performance of surface acoustic wave resonator in CMOS technology for single and double electrode (IDT) structure is presented. Interdigitated electrodes (IDT) structure in surface acoustic wave (SAW) resonator is the most crucial component for excitation of SAW devices. Possible configurations for the IDT are single electrode and double electrode. The performance of the resonator for single and double electrode is compared at a frequency range of 0.5 GHz to 1 GHz. 2D Finite element modeling of the CMOS SAW resonator was simulated using COMSOL Multiphysics® for three step analysis eigen frequency, frequency domain and time domain analysis. The structure and dimension of the device is based on 0.18 μm RF CMOS process where the pattern of IDT is fabricated using standard CMOS fabrication process. The simulated results shows high quality factor in the order of thousands for double electrode CMOS SAW resonator compared to single electrode CMOS SAW resonator. 2013 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/46638/1/46638.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Hashim, Uda (2013) Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure. In: 2013 IEEE Regional Symposium on Micro and Nano Electronics (RSM 2013), 25th-27th October 2013, Langkawi, Malaysia. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6706458&tag=1 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Hashim, Uda Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title | Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title_full | Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title_fullStr | Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title_full_unstemmed | Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title_short | Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure |
| title_sort | finite element modeling of saw resonator in cmos technology for single and double interdigitated electrode (idt) structure |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/46638/ http://irep.iium.edu.my/46638/ http://irep.iium.edu.my/46638/1/46638.pdf |