Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator

QR Code

Comparative analysis of zinc oxide and aluminium doped ZnO for GHz CMOS MEMS surface acoustic wave resonator

CMOS integration in RF MEMS have become dominant due to the growing demand of mobile and wireless communication system. Usage of off chip resonators is not efficient since it leads to large area and high interfacing loss. Integration of CMOS with SAW resonators is a possible solution to reduce the l...

Full description

Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin
Format:	Proceeding Paper
Language:	English
Published:	2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/46637/ http://irep.iium.edu.my/46637/1/46637.pdf

Similar Items

Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2015)

Analysis of electromechanical coupling coefficient of surface acoustic wave resonator in ZnO piezoelectric thin film structure
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

Silicon compatible acoustic wave resonators: design, fabrication and performance
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

RF CMOS-MEMS cantilever resonator
by: Zainuddin, Ahmad Anwar, et al.
Published: (2013)

Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator
by: Karim, Jamilah, et al.
Published: (2015)

Equivalent circuit modeling of two-port Al-doped Zinc Oxide CMOS SAW resonator using MATLAB™
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2013)

Design and simulation of two-stage CMOS amplifier for MEMS resonator
by: Mohd Taufik, Muhammad Syamsi, et al.
Published: (2013)

Design and analysis of a boosted pierce oscillator using MEMS SAW resonators
by: Md Hamzah, Mohd Haidar, et al.
Published: (2018)

Finite element modeling of SAW resonator in CMOS technology for single and double interdigitated electrode (IDT) structure
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2013)

Design and simulation of film bulk acoustic wave resonator (FBAR) gas sensor based on ZnO thin film
by: Zarifsofia, Sabani, et al.
Published: (2019)

Design and simulation of 20MHz oscillator using CMOS-MEMS beam resonators
by: Zainuddin, Ahmad Anwar, et al.
Published: (2013)

Piezoelectric characteristics of CMOS compatible AIN SAW resonators
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2014)

Implementation of CMOS oscillator for CMOS SAW resonator
by: Karim, Jamilah, et al.
Published: (2016)

Gm/ID approach for low power sustaining amplifier circuit for GHz range MEMS SAW oscillator
by: Kamarudin, Norlizawati, et al.
Published: (2019)

A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2017)

Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2015)

Simulation of MEMs piezoelectric energy harvester
by: Md Ralib, Aliza Aini, et al.
Published: (2010)

Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave
by: Nordin, Anis Nurashikin, et al.
Published: (2006)

Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch
by: Ma, Li Ya, et al.
Published: (2013)

Low power and high voltage swing cascode Pierce oscillator for MEMS SAW resonators
by: Md Hamzah, Mohd Haidar, et al.
Published: (2016)

Design of two-stage CMOS amplifier for quartz crystal resonator
by: Mohd Taufik, Muhammad Syamsi, et al.
Published: (2013)

Modeling and fabrication of CMOS surface acoustic wave resonators
by: Nordin, Anis Nurashikin, et al.
Published: (2007)

Investigation of acoustic wavelength effects on silicon compatible Al doped ZnO SAW resonator
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2016)

Development of an RF-CMOS surface acoustic wave (SAW) resonator
by: Sidek, Fatini, et al.
Published: (2011)

Enhanced piezoelectric properties of aluminium doped zinc oxide thin film for surface acoustic wave resonators on a CMOS platform
by: Md Ralib, Aliza Aini, et al.
Published: (2017)

Design and simulation of 10 MHz MEMS oscillator
by: Taufik, Mohamad Syamsi, et al.
Published: (2014)

RF oscillator implementation using integrated CMOS surface acoustic wave resonators
by: Nordin, Anis Nurashikin, et al.
Published: (2011)

Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas
by: Mohamad Razali, Nur Fatin, et al.
Published: (2018)

Design and optimization of a MEMS quartz mass sensor array for biosensing
by: Zainuddin, Ahmad Anwar, et al.
Published: (2018)

Design and optimization of alLow-voltage shunt capacitive RF-MEMS switch
by: Ma, Li Ya, et al.
Published: (2014)

Highly sensitive Escherichia coli shear horizontal surface acoustic wave biosensor with silicon dioxide nanostructures
by: Ten, Seng Teik, et al.
Published: (2017)

CMOS surface acoustic wave oscillators
by: Nordin, Anis Nurashikin, et al.
Published: (2005)

Design, optimization and simulation of a low‑voltage shunt capacitive RF‑MEMS switch
by: Ma, Li Ya, et al.
Published: (2015)

Theoretical and simulated investigation of dielectric charging effect on a capacitive RF-MEMS switch
by: Ma, Li Ya, et al.
Published: (2016)

Application of Taguchi signal to noise ratio design method to ZnO thin film CMOS SAW resonators
by: Md Ralib @ Md Raghib, Aliza 'Aini, et al.
Published: (2019)

Design and simulation of RF-CMOS SPST switch for reconfigurable RF front-end
by: Soeroso, Iksannurazmi Bambang, et al.
Published: (2014)

A novel design of low-voltage low-loss K-band RF-MEMS capacitive switch
by: Ma, Li-Ya, et al.
Published: (2018)

Acoustic wave based MEMS devices, development and application
by: Voiculescu, Ioana, et al.
Published: (2012)

Tunable bandpass filter using RF MEMS switches
by: Alam, A. H. M. Zahirul, et al.
Published: (2009)

Optical-resonator-based biosensing systems: current status and future prospects
by: Nordin, Anis Nurashikin
Published: (2016)