Design and analysis of a low-voltage electrostatic
actuated RF CMOS-MEMS switch

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Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch

This paper presents the design and analysis of a radio frequency (RF) micro-electromechanical system (MEMS) switch with low actuation voltage using MIMOS 0.35μm complementary metal oxide semiconductor (CMOS) process. The advantage of this RF MEMS switch is very low actuation voltage design which is...

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Bibliographic Details
Main Authors:	Ma, Li Ya, Nordin, Anis Nurashikin, Soin, Norhayati
Format:	Proceeding Paper
Language:	English
Published:	2013
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/46633/ http://irep.iium.edu.my/46633/1/C_-_2013_-_Design_and_Analysis_of_a_Low-Voltage_Electrostatic_Actuated_RF_CMOS-MEMS_Switch.pdf

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