Piezoelectric characteristics of CMOS compatible AIN SAW resonators

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Piezoelectric characteristics of CMOS compatible AIN SAW resonators

In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Pandian, Mohanraj Saundara, Ferrer, Eloi Mariago, Song, Charlie TayWee, Shunmugam, Muniandy, Zainuddin, Ahmad Anwar, Nordin, Anis Nurashikin
Format:	Proceeding Paper
Language:	English English
Published:	2014
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf

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