Piezoelectric characteristics of CMOS compatible AIN SAW resonators
In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AI...
| Main Authors: | , , , , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
2014
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| Online Access: | http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf |
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| author | Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin |
| author_facet | Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin |
| author_sort | Md Ralib @ Md Raghib, Aliza 'Aini |
| building | IIUM Repository |
| collection | Online Access |
| description | In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity. |
| first_indexed | 2025-11-14T16:10:41Z |
| format | Proceeding Paper |
| id | iium-45296 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T16:10:41Z |
| publishDate | 2014 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-452962017-09-27T04:17:32Z http://irep.iium.edu.my/45296/ Piezoelectric characteristics of CMOS compatible AIN SAW resonators Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices In this work, we predict the surface acoustic wave characteristics by 2D COMSOL finite element modeling. The dispersion of simulated acoustic mode shapes, acoustic phase velocity and coupling coefficient were performed on a CMOS-compatible 1.4 GHz SAW resonator. C-axis oriented Aluminium Nitride (AIN) was chosen as the piezoelectric material due to its compatibility with CMOS technology and higher phase velocity. The influences of AIN thickness on electromechanical coupling coefficient and phase velocity are discussed. High acoustic velocities (v∼5220 m/s) and coupling factors (k2∼0.19%) can be observed for SAW resonator with khAIN∼ 3.9. The measurement results are found to be consistent with FEM results with deviation less than 6% for resonance frequency and phase velocity. 2014 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/45296/1/45296.pdf application/pdf en http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Pandian, Mohanraj Saundara and Ferrer, Eloi Mariago and Song, Charlie TayWee and Shunmugam, Muniandy and Zainuddin, Ahmad Anwar and Nordin, Anis Nurashikin (2014) Piezoelectric characteristics of CMOS compatible AIN SAW resonators. In: 2014 Asia-Pacific Microwave Conference (APMC 2014), 4th-7th Nov 2014, Sendai, Japan. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7067949&tag=1 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Md Ralib @ Md Raghib, Aliza 'Aini Pandian, Mohanraj Saundara Ferrer, Eloi Mariago Song, Charlie TayWee Shunmugam, Muniandy Zainuddin, Ahmad Anwar Nordin, Anis Nurashikin Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title | Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title_full | Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title_fullStr | Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title_full_unstemmed | Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title_short | Piezoelectric characteristics of CMOS compatible AIN SAW resonators |
| title_sort | piezoelectric characteristics of cmos compatible ain saw resonators |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/ http://irep.iium.edu.my/45296/1/45296.pdf http://irep.iium.edu.my/45296/4/45296_Piezoelectric%20characteristics%20of%20CMOS.SCOPUS.pdf |