Design, optimization and simulation of a low‑voltage shunt
capacitive RF‑MEMS switch

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Design, optimization and simulation of a low‑voltage shunt capacitive RF‑MEMS switch

This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is electrostatically actuated. The structure contains a coplanar waveguide, a big suspended membrane, four folded beams to support the mem...

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Bibliographic Details
Main Authors:	Ma, Li Ya, Nordin, Anis Nurashikin, Soin, Norhayati
Format:	Article
Language:	English English
Published:	Springer Berlin / Heidelberg 2015
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/45283/ http://irep.iium.edu.my/45283/1/Microsystems_2015.pdf http://irep.iium.edu.my/45283/4/45283_Design%2C%20optimization%20and%20simulation_scopus.pdf

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