Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices

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Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices

We report the deposition of high quality c-axis oriented Aluminium doped Zinc Oxide (AZO) on silicon substrate for surface acoustic wave (SAW) applications. AZO thin film is prepared by Radio frequency magnetron sputtering method. Sputtering is a preferred method because it is able to perform deposi...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Othman, Raihan
Format:	Proceeding Paper
Language:	English English
Published:	2015
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/45282/ http://irep.iium.edu.my/45282/1/45282.pdf http://irep.iium.edu.my/45282/4/45282_Dependence%20of%20preferred%20c-axis%20orientation_Scopus.pdf

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