Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

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Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor

In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...

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Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Bais, Badariah, Majlis, Yeop Burhanuddin
Format:	Proceeding Paper
Language:	English English
Published:	2015
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf

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