Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresisti...
| Main Authors: | , , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
2015
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf |
| _version_ | 1848782615988928512 |
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| author | Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin |
| author_facet | Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin |
| author_sort | Ab Rahim, Rosminazuin |
| building | IIUM Repository |
| collection | Online Access |
| description | In this paper, the fabrication of monolithic
Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresistive microcantilever formation, aluminum deposition of
Wheatstone bridge interconnections and microcantilever release. The electrical discontinuity of interconnections which is one of the major issues encountered in the fabrication process is discussed and analyzed. Deposition of proper thickness of metal interconnection layers through metal evaporation process accompanied with annealing process at low temperature ensures complete electrical connections in the monolithic Wheatstone
bridge configuration. Measurement of the fabricated Wheatstone bridge circuit shows a good agreement between theoretical and experimental values indicating successful fabrication of the device. Fabrication of piezoresistive microcantilever structure integrated with monolithic Wheatstone bridge circuit with resistance values in the range of 1 to 9 kΩ has been successfully realized using silicon micromachining technology. |
| first_indexed | 2025-11-14T16:08:17Z |
| format | Proceeding Paper |
| id | iium-44490 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T16:08:17Z |
| publishDate | 2015 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-444902018-03-06T03:28:00Z http://irep.iium.edu.my/44490/ Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin T Technology (General) In this paper, the fabrication of monolithic Wheatstone bridge circuit on piezoresistive microcantilever sensor is presented. The development of the device is realized through silicon micromachining technology on silicon substrate through three major fabrication steps including silicon piezoresistive microcantilever formation, aluminum deposition of Wheatstone bridge interconnections and microcantilever release. The electrical discontinuity of interconnections which is one of the major issues encountered in the fabrication process is discussed and analyzed. Deposition of proper thickness of metal interconnection layers through metal evaporation process accompanied with annealing process at low temperature ensures complete electrical connections in the monolithic Wheatstone bridge configuration. Measurement of the fabricated Wheatstone bridge circuit shows a good agreement between theoretical and experimental values indicating successful fabrication of the device. Fabrication of piezoresistive microcantilever structure integrated with monolithic Wheatstone bridge circuit with resistance values in the range of 1 to 9 kΩ has been successfully realized using silicon micromachining technology. 2015 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/44490/1/44490.pdf application/pdf en http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf Ab Rahim, Rosminazuin and Nordin, Anis Nurashikin and Abdul Malik, Noreha and Bais, Badariah and Majlis, Yeop Burhanuddin (2015) Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor. In: 2015 Symposium on Design, Integration, Test and Packaging of MEMS and MOEMS (DTIP), 27th-30th April 2015, Montpellier, France. http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=7160998 10.1109/DTIP.2015.7160998 |
| spellingShingle | T Technology (General) Ab Rahim, Rosminazuin Nordin, Anis Nurashikin Abdul Malik, Noreha Bais, Badariah Majlis, Yeop Burhanuddin Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title | Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title_full | Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title_fullStr | Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title_full_unstemmed | Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title_short | Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| title_sort | fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor |
| topic | T Technology (General) |
| url | http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/ http://irep.iium.edu.my/44490/1/44490.pdf http://irep.iium.edu.my/44490/4/44490_Fabrication%20of%20monolithic%20wheatstone%20bridge_Scopus.pdf |