Fabrication of dual- and single-layer piezo resistive micro cantilever sensor

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Fabrication of dual- and single-layer piezo resistive micro cantilever sensor

In this paper, the fabrication of piezoresistive microcantilever (PRM) sensor was realized through the utilization of bulk micromachining technology. Through a sequence of photolithography and etching processes, the device fabrication is realized. The fabrication of two PRM designs, dual-layer and...

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Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Majlis, Yeop Burhanuddin
Format:	Article
Language:	English
Published:	Asian Research Publishing Network (ARPN) 2015
Subjects:	TA168 Systems engineering
Online Access:	http://irep.iium.edu.my/44474/ http://irep.iium.edu.my/44474/1/journal_ARPN_published.pdf

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