Silicon compatible acoustic wave resonators: design, fabrication and performance

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Silicon compatible acoustic wave resonators: design, fabrication and performance

Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growth in wireless products. The bulky size of discrete vibrating mechanical devices such as quartz crystals and surface acoustic wave resonators impedes the ultimate miniaturization of single-chip tran...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin
Format:	Article
Language:	English
Published:	IIUM Press 2014
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/41610/ http://irep.iium.edu.my/41610/1/437-2144-2-PB.pdf

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