Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

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Investigation of surface roughness in micro-electro discharge machining of nonconductive ZrO2 for MEMS application

Micro-electro discharge machining technique, a noncontact machining process, is applied for drilling blind hole on nonconductive ZrO2 ceramic for MEMS application. A conductive layer of adhesive copper is applied on the workpiece surface to initiate the sparks. Kerosene is used as dielectric for cre...

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Bibliographic Details
Main Authors:	Sabur, Abdus, A., Moudood, Ali, Mohammad Yeakub, Maleque, Md. Abdul
Format:	Article
Language:	English
Published:	IOP Publishing 2013
Subjects:	TS Manufactures
Online Access:	http://irep.iium.edu.my/40692/ http://irep.iium.edu.my/40692/1/2013_IOP_53_012090.pdf

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