Performance analysis of zinc oxide piezoelectric MEMS energy harvester

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Performance analysis of zinc oxide piezoelectric MEMS energy harvester

This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate inf...

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Bibliographic Details
Main Authors:	Jamain, Umi Milhana, Ibrahim, Nur Hidayah, Ab Rahim, Rosminazuin
Format:	Proceeding Paper
Language:	English English
Published:	2014
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf

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