Performance analysis of zinc oxide piezoelectric MEMS energy harvester
This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate inf...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
2014
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| Online Access: | http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf |
| _version_ | 1848781817112428544 |
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| author | Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin |
| author_facet | Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin |
| author_sort | Jamain, Umi Milhana |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied. |
| first_indexed | 2025-11-14T15:55:35Z |
| format | Proceeding Paper |
| id | iium-39598 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T15:55:35Z |
| publishDate | 2014 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-395982017-09-26T08:49:09Z http://irep.iium.edu.my/39598/ Performance analysis of zinc oxide piezoelectric MEMS energy harvester Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin T Technology (General) This paper presents the design and analysis of MEMS piezoelectric energy harvester. Zinc oxide (ZnO) MEMS piezoelectric energy harvester has been utilized as piezoelectrically active cantilever for mechanical to electrical transduction. A COMSOL Multiphysics model was used which provide accurate information on the frequency, stress and voltage output of a ZnO piezoelectric energy harvester. Few design parameters have been studied which are rectangular cantilever, triangular cantilever, rectangular cantilever with proof mass and using different types of piezoelectric materials. The effects of varying geometrical dimensions of the device were also investigated. From simulation results, it was found out that ZnO piezoelectric energy harvester with the length of 150 μm, width 50 μm and thickness of 4 μm generates 9.9184 V electric potential under the resonance frequency of 0.71 MHz and 1 μN/m2 mechanical force applied. 2014 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/39598/1/icse2014_published.pdf application/pdf en http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf Jamain, Umi Milhana and Ibrahim, Nur Hidayah and Ab Rahim, Rosminazuin (2014) Performance analysis of zinc oxide piezoelectric MEMS energy harvester. In: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE, 27th-29th Aug 2014, Kuala Lumpur. http://ieeexplore.ieee.org |
| spellingShingle | T Technology (General) Jamain, Umi Milhana Ibrahim, Nur Hidayah Ab Rahim, Rosminazuin Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title | Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title_full | Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title_fullStr | Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title_full_unstemmed | Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title_short | Performance analysis of zinc oxide piezoelectric MEMS energy harvester |
| title_sort | performance analysis of zinc oxide piezoelectric mems energy harvester |
| topic | T Technology (General) |
| url | http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/ http://irep.iium.edu.my/39598/1/icse2014_published.pdf http://irep.iium.edu.my/39598/4/39598_Performance%20analysis%20of%20zinc%20oxide.SCOPUS.pdf |