Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage

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Development of copper based miniature electrostatic actuator using WEDM with low actuation voltage

Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interfero...

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Bibliographic Details
Main Authors:	Bhuiyan, Moinul, Shihab, Baten
Format:	Article
Language:	English
Published:	Springer 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/39442/ http://irep.iium.edu.my/39442/1/Electrostatic_Actuator.pdf

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