Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator

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Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator

CMOS integration for RF-MEMS is desired to yield compact, low-power and portable devices. In this work, we illustrate the usage of double electrode CMOS SAW resonators using both ZnO and AlN as its piezoelectric material. Double electrode transducers were chosen, as they are better at suppressi...

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Bibliographic Details
Main Authors:	Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Alam, A. H. M. Zahirul, Hashim, Uda, Othman, Raihan
Format:	Article
Language:	English
Published:	Springer Berlin / Heidelberg 2015
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/39246/ http://irep.iium.edu.my/39246/7/39246_Piezoelectric_thin_films_for_double_electrode.pdf

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