Design and simulation of 10 MHz MEMS oscillator

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Design and simulation of 10 MHz MEMS oscillator

Design and analysis of a 10MHz oscillator is presented. To perform oscillator circuit simulations, the CMOS-MEMS Clamped-Clamped beam) resonator structure is modeled using its RLC equivalent circuit approach. For a MEMS resonator to be able to function as an oscillator it needs to be coupled with an...

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Bibliographic Details
Main Authors:	Taufik, Mohamad Syamsi, Khan, Sheroz, Nordin, Anis Nurashikin, Zainuddin, Ahmad Anwar
Format:	Proceeding Paper
Language:	English
Published:	IEEE 2014
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/39245/ http://irep.iium.edu.my/39245/1/06860920.pdf

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