Analysis of electrical responses of MEMS piezoresistive microcantilever

QR Code

Analysis of electrical responses of MEMS piezoresistive microcantilever

In this paper, an optimization of mechanical and electrical performance of single-layer silicon piezoresistive microcantilever (PRM) sensor in which both piezoresistor and microcantilever structures are made of the same material of single-crystalline silicon was discussed. Using CoventorWare 2008, t...

Full description

Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Ookar Abubakkar, Sheik Fareed, Bais, Badariah, Yeop Majlis, Burhanuddin
Format:	Proceeding Paper
Language:	English English
Published:	2014
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/39191/ http://irep.iium.edu.my/39191/1/39191.pdf http://irep.iium.edu.my/39191/4/39191_Analysis%20of%20electrical%20responses%20of%20MEMS_Scopus.pdf

Similar Items

Design optimization of MEMS dual-leg shaped piezoresistive microcantilever
by: Ab Rahim, Rosminazuin, et al.
Published: (2013)

Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching
by: Ab Rahim, Rosminazuin, et al.
Published: (2014)

Fabrication of dual- and single-layer piezoresistive microcantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
by: Zakaria, Mohd Hazrul, et al.
Published: (2012)

Fabrication of monolithic wheatstone bridge circuit for piezoresistive microcantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Induced mass change technique for glucose detection in microcantilever-based sensors
by: Mohd Nor, Mardhiah, et al.
Published: (2012)

SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
by: Lee, Kok Siong
Published: (2011)

Fabrication effects on polysilicon-based microcantilever piezoresistivity for biological sensing application
by: Nina Korlina Madzhi,, et al.
Published: (2011)

Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi
by: Madzhi, Nina Korlina
Published: (2012)

Fabrication of dual- and single-layer piezo resistive micro cantilever sensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor
by: Yunas, Jumril, et al.
Published: (2014)

Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
by: Jumril Yunas,, et al.
Published: (2014)

ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon
by: Ab Rahim, Rosminazuin, et al.
Published: (2013)

An alternative polymeric protection mask for bulk KOH etching of silicon
by: Ab Rahim, Rosminazuin, et al.
Published: (2012)

Dimension Optimization of a MEMS LC Pressure Sensor
by: Mohsen, Nabipoor, et al.
Published: (2008)

Investigations on physical characteristics of three-dimensional coil structure for MEMS magnetometer
by: Sulaiman, Nadzril, et al.
Published: (2013)

MEMS very low capacitive pressure sensor based on CMOS process
by: Muhamad Ramdzan Buyong,, et al.
Published: (2011)

3MeV-electron beam induced threshold voltage shifts and drain current degradation on ZVN3320FTA & ZVP3310FTA commercial MOSFETs
by: Abubakkar, Sheik Fareed Ookar, et al.
Published: (2014)

Development of MEMS cantilever-based biosensor
by: Ab Rahim, Rosminazuin, et al.
Published: (2015)

Pencirian pertumbuhan lapisan nano grafin di atas elektrod antara digit superkapasitor MEMS
by: Hafzaliza Erny Zainal Abidin,, et al.
Published: (2017)

Performance analysis of zinc oxide piezoelectric MEMS energy harvester
by: Jamain, Umi Milhana, et al.
Published: (2014)

A review: properties of silicon carbide materials in MEMS application
by: Marsi, Noraini, et al.
Published: (2020)

Design and Simulation of MEMS Hemholtz Resonator for Acoustic Energy Harvester
by: Ab Rahim, Rosminazuin, et al.
Published: (2016)

Design and simulation of MEMS helmholtz resonator for acoustic energy harvester
by: Johari, Muhammad Jabrullah, et al.
Published: (2016)

Feasibility study of GaN-based MEMS capacitive microphone using finite element method
by: Rahmat Zaki Auliya,, et al.
Published: (2020)

Effects of electron radiation on commercial power MOSFET with buck converter application
by: Abubakkar, Sheik Fareed Ookar, et al.
Published: (2017)

Investigation of piezoresistive sensor for robotic gripping operations
by: Al-Shanoon, Abdulrahman Abdulkareem Sattoori, et al.
Published: (2015)

Sensitivity of piezoresistive pressure sensor with inner diaphragm
by: Chua, Kean Hong, et al.
Published: (2017)

Piezoresistive Elastomer Sensor for Electronic Skin Application
by: Chong, Yung Sin
Published: (2016)

Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications
by: Abd Aziz, Norazreen, et al.
Published: (2015)

Controlling piezoresistance in single molecules through the isomerisation of bullvalenes
by: Reimers, J.R., et al.
Published: (2023)

FEM analysis of wavelength effects in piezoelectric substrate
by: Abd Aziz, Norazreen, et al.
Published: (2014)

In situ electrochemical microcantilever bending test: A new insight into hydrogen enhanced cracking
by: Hajilou, T., et al.
Published: (2017)

Influence of strain rate on the piezoresistive behavior of conductive polyamide composites
by: Zhang, M., et al.
Published: (2016)

A sensitivity study of piezoresistive pressure sensor for robotic hand
by: Almassri, Ahmed M. M., et al.
Published: (2013)

Simulation study of side-by-side spiral coil design for micromagnetometer
by: Sulaiman, Nadzril, et al.
Published: (2011)

Pembangunan kaedah reka bentuk dan fabrikasi diafram beralun silikon menggunakan teknik punaran anisotropik KOH
by: Norhayati Soin,, et al.
Published: (2006)

Hydrogen enhanced cracking studies on Fe-3wt%Si single and bi-crystal microcantilevers
by: Hajilou, T., et al.
Published: (2017)

Design and optimization of a MEMS quartz mass sensor array for biosensing
by: Zainuddin, Ahmad Anwar, et al.
Published: (2018)

Low cost piezoresistive pressure sensor matrix for pressure ulcer prevention and management
by: Fajingbesi, Fawwaz Eniola, et al.
Published: (2020)