Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching

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Simple microcantilever release process of silicon piezoresistive microcantilever sensor using wet etching

In this paper, a simple microcantilever release process using anisotropic wet etching is presented. The microcantilever release is conducted at the final stage of the fabrication of piezoresistive microcantilever sensor. Issues related to microcantilever release such as microscopic roughness and mac...

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Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin
Format:	Article
Language:	English
Published:	Trans Tech Publications Ltd., Switzerland 2014
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/38849/ http://irep.iium.edu.my/38849/1/applied_mechanics_and_materials.pdf

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