Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS

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Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS

In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the micr...

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Bibliographic Details
Main Authors:	Zakaria, Mohd Hazrul, Bais, Badariah, Ab Rahim, Rosminazuin, Yeop Majlis, Burhanuddin
Format:	Proceeding Paper
Language:	English
Published:	2012
Subjects:	T Technology (General)
Online Access:	http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf

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