Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS
In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the micr...
| Main Authors: | , , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf |
| _version_ | 1848781671480950784 |
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| author | Zakaria, Mohd Hazrul Bais, Badariah Ab Rahim, Rosminazuin Yeop Majlis, Burhanuddin |
| author_facet | Zakaria, Mohd Hazrul Bais, Badariah Ab Rahim, Rosminazuin Yeop Majlis, Burhanuddin |
| author_sort | Zakaria, Mohd Hazrul |
| building | IIUM Repository |
| collection | Online Access |
| description | In this paper, characterization on the geometrical
aspects of a single layer, p-doped silicon based piezoresistive
microcantilever using finite element method is presented. The
displacement and the von Mises stress obtained from the
simulation were observed by varying the geometries of the
microcantilever namely the thickness, length, width and the
distance between the piezoresistor legs. The sensitivity of the
microcantilever was then calculated and tabulated. From the
simulation results, it can be shown that the displacement and
sensitivity of the single layer piezoresistive microcantilever is
comparable to the dual layer counterpart with the thinner
microcantilever resulted in a maximum displacement and
sensitivity, compared to other geometrical factors. |
| first_indexed | 2025-11-14T15:53:16Z |
| format | Proceeding Paper |
| id | iium-38793 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:53:16Z |
| publishDate | 2012 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-387932025-02-08T08:22:49Z http://irep.iium.edu.my/38793/ Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS Zakaria, Mohd Hazrul Bais, Badariah Ab Rahim, Rosminazuin Yeop Majlis, Burhanuddin T Technology (General) In this paper, characterization on the geometrical aspects of a single layer, p-doped silicon based piezoresistive microcantilever using finite element method is presented. The displacement and the von Mises stress obtained from the simulation were observed by varying the geometries of the microcantilever namely the thickness, length, width and the distance between the piezoresistor legs. The sensitivity of the microcantilever was then calculated and tabulated. From the simulation results, it can be shown that the displacement and sensitivity of the single layer piezoresistive microcantilever is comparable to the dual layer counterpart with the thinner microcantilever resulted in a maximum displacement and sensitivity, compared to other geometrical factors. 2012 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf Zakaria, Mohd Hazrul and Bais, Badariah and Ab Rahim, Rosminazuin and Yeop Majlis, Burhanuddin (2012) Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS. In: 10th IEEE International Conference on Semiconductor Electronics, ICSE 2012, 19-21 September 2012, Kuala Lumpur. http://ieeeexplore.com/xpl/articleDetails.jsp?tp=&arnumber=6417154&searchWithin%3Dp_Authors%3A.QT.Bais%2C+B..QT. |
| spellingShingle | T Technology (General) Zakaria, Mohd Hazrul Bais, Badariah Ab Rahim, Rosminazuin Yeop Majlis, Burhanuddin Geometrical characterization of single layer silicon based piezoresistive microcantilever using ANSYS |
| title | Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS |
| title_full | Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS |
| title_fullStr | Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS |
| title_full_unstemmed | Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS |
| title_short | Geometrical characterization of single layer silicon
based piezoresistive microcantilever using ANSYS |
| title_sort | geometrical characterization of single layer silicon
based piezoresistive microcantilever using ansys |
| topic | T Technology (General) |
| url | http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/ http://irep.iium.edu.my/38793/1/IEEE_Published_ICSE_2012.pdf |