Electrical properties dependence on substrate temperature of
sputtered ZnO nanoparticles thin films on teflon substrates

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Electrical properties dependence on substrate temperature of sputtered ZnO nanoparticles thin films on teflon substrates

Zinc oxide (ZnO) thin films were deposited on teflon substrates by RF magnetron sputtering at different substrate temperature. The effect of substrate temperature on ZnO thin films electrical and structural properties were examined using current-voltage (I-V) measurement, and xray diffraction (XRD)...

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Bibliographic Details
Main Authors:	Nur Sa’adah, Muhamad Sauki, Herman, Sukreen Hana, Ani, Mohd Hanafi, Mohamad Rusop , Mahmood
Format:	Article
Language:	English
Published:	Trans Tech Publications, Switzerland 2013
Subjects:	TA Engineering (General). Civil engineering (General) TA401 Materials of engineering and construction
Online Access:	http://irep.iium.edu.my/37597/ http://irep.iium.edu.my/37597/1/Electrical_properties_dependence_on_substrate_temperature_of_sputtered_ZnO_nanoparticles_thin_films_on_teflon_substrates.pdf

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