Design and modeling of MEMS SAW resonator on Lithium Niobate
Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are ge...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2011
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| Online Access: | http://irep.iium.edu.my/3732/ http://irep.iium.edu.my/3732/1/29.pdf |
| _version_ | 1848776208815226880 |
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| author | Ramli, Noor Amalina Nordin, Anis Nurashikin |
| author_facet | Ramli, Noor Amalina Nordin, Anis Nurashikin |
| author_sort | Ramli, Noor Amalina |
| building | IIUM Repository |
| collection | Online Access |
| description | Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are generated by injecting electrical energy using interdigitated transducers (IDTs) into the piezoelectric material which transforms it into propagating mechanical waves. This project intends to study the key design parameters that affect the performance of SAW resonator such as optimum spacing between IDT and reflector, optimum spacing of IDTs and the numbers of reflector in order to get the highest mechanical displacement. Key requirements of a SAW resonator include having precise resonant frequency (fr), low insertion losses, and high quality factors (Q). To meet these requirements, it is necessary to investigate the key design parameters; number of reflectors, number of IDTs, periodic distance of transducer fingers ( #x03BB;), spacing between IDT and reflector. Finite element simulations to determine the optimum SAW resonator design was performed using COMSOL Multiphysics #x2122;. |
| first_indexed | 2025-11-14T14:26:27Z |
| format | Proceeding Paper |
| id | iium-3732 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:26:27Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-37322013-08-20T04:19:09Z http://irep.iium.edu.my/3732/ Design and modeling of MEMS SAW resonator on Lithium Niobate Ramli, Noor Amalina Nordin, Anis Nurashikin TK7885 Computer engineering Surface Acoustic Wave (SAW) resonators are essential components for modern communication systems. They can function as filters and frequency synthesizers. SAW resonators operate based on the principle of acoustic waves propagating along the surface of a solid piezoelectric material. The waves are generated by injecting electrical energy using interdigitated transducers (IDTs) into the piezoelectric material which transforms it into propagating mechanical waves. This project intends to study the key design parameters that affect the performance of SAW resonator such as optimum spacing between IDT and reflector, optimum spacing of IDTs and the numbers of reflector in order to get the highest mechanical displacement. Key requirements of a SAW resonator include having precise resonant frequency (fr), low insertion losses, and high quality factors (Q). To meet these requirements, it is necessary to investigate the key design parameters; number of reflectors, number of IDTs, periodic distance of transducer fingers ( #x03BB;), spacing between IDT and reflector. Finite element simulations to determine the optimum SAW resonator design was performed using COMSOL Multiphysics #x2122;. 2011-05 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/3732/1/29.pdf Ramli, Noor Amalina and Nordin, Anis Nurashikin (2011) Design and modeling of MEMS SAW resonator on Lithium Niobate. In: 4th International Conference on Mechatronics: Integrated Engineering for Industrial and Societal Development (ICOM 2011), 17-19 May, 2011, Kuala Lumpur, Malaysia. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5937127&tag=1 |
| spellingShingle | TK7885 Computer engineering Ramli, Noor Amalina Nordin, Anis Nurashikin Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title | Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title_full | Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title_fullStr | Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title_full_unstemmed | Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title_short | Design and modeling of MEMS SAW resonator on Lithium Niobate |
| title_sort | design and modeling of mems saw resonator on lithium niobate |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/3732/ http://irep.iium.edu.my/3732/ http://irep.iium.edu.my/3732/1/29.pdf |