Novel MEMS fully differential capacitive transducer design and analysis

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Novel MEMS fully differential capacitive transducer design and analysis

This paper details the design and analysis of a novel MEMS fully differential capacitive sensor which can be used to measure the parameter related to force changes, such as pressure or acceleration. This MEMS model uses a new structure to get extremely high resolution of 11.6fF/KPa. Further it has a...

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Bibliographic Details
Main Authors:	Ya, Ma Li, Khan, Sheroz, Nordin, Anis Nurashikin, Al-Khateeb, Khalid A. Saeed, Islam, Md. Rafiqul, Naji, Ahmed Wathik
Format:	Proceeding Paper
Language:	English
Published:	2011
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3731/ http://irep.iium.edu.my/3731/1/28.pdf

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