Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave

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Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave

The design and fabrication of an integrated 1GHz surface acoustic wave (SAW) resonator is described in this paper. The SAW resonator was fabricated using a combination of CMOS plus surface micromachining techniques. Utilizing the minimum feature size of the available 0.6 micron AMI CMOS process, the...

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Bibliographic Details
Main Authors:	Nordin, Anis Nurashikin, Zaghloul, Mona E.
Format:	Proceeding Paper
Language:	English
Published:	2006
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3718/ http://irep.iium.edu.my/3718/1/21.pdf

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