Enhancing μ-wedming (wire electro-discharge machining) of polished silicon wafer by conductive coating

QR Code

Enhancing μ-wedming (wire electro-discharge machining) of polished silicon wafer by conductive coating

Micro-Wire Electro-discharge machining (-WEDM) is a nonconventional machining technology which is extensively used for metal based micro fabrication process. This is a non-contact machining process where material removal is taken place by electro-thermal action. -WEDM process is difficult to be ap...

Full description

Bibliographic Details
Main Authors:	Rasheed, Aous Naji, Abdul Muthalif, Asan Gani, Saleh, Tanveer
Format:	Article
Language:	English
Published:	Nova Science Publisher 2014
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/37120/ http://irep.iium.edu.my/37120/1/Vol5_1-2_JMTR.pdf

Similar Items

Improving μ-wire electro-discharge machining operation of polished silicon wafer by conductive coating
by: Rasheed, Aous Naji, et al.
Published: (2014)

Experimental study on improving μ- WEDM and μ-EDM of doped silicon by temporary metallic coating
by: Saleh, Tanveer, et al.
Published: (2015)

Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining
by: Jarin, Sams, et al.
Published: (2018)

Investigation on the effect of "nano-powder" in micro-wire electro-discharge machining (μ-WEDM) process for fabricating micro actuators with nanometric mirror surface
by: Saleh, Tanveer, et al.
Published: (2017)

An improved machining process of polished silicon using nano powder mixed micro-wire electro discharge machining
by: Jarin, Sams, et al.
Published: (2017)

An experimental investigation on the effect of nanopowder for micro-wire electro discharge machining of gold coated silicon
by: Jarin, Sams, et al.
Published: (2017)

An experimental investigation of gold coated silicon using nano powder mixed micro-wire electro discharge machining
by: Jarin, Sams, et al.
Published: (2016)

Characterization of polished silicon wafer / by Rajan Subramaniam.
by: Subramaniam, Rajan
Published: (2003)

Influence of Wire Electrical Discharge Machining (WEDM) process parameters on surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2018)

Artificial neural network modelling and analysis of carbon nanopowder mixed micro wire electro discharge machining of gold coated doped silicon
by: Jarin, Sams, et al.
Published: (2019)

Kerf in micro wire electro discharge machining
by: Sabur, Abdus, et al.
Published: (2011)

Investigation of kerf in micro wire electro discharge machining
by: Ali, Mohammad Yeakub, et al.
Published: (2017)

Powder mixed micro electro discharge machining (PMμEDM)
by: Ali, Mohammad Yeakub
Published: (2011)

Influence of the angle of cut of workpiece on taper and corner roundness during Wire Electrical Discharge Machining (WEDM)
by: Khan, Ahsan Ali, et al.
Published: (2017)

Performance evaluation of wire electro-discharge machining on tungsten carbide
by: Hassan, Mas Ayu
Published: (2006)

Electro-chemical mechanical polishing of copper and chemical mechanical polishing of glass
by: Venkatesh, Vasisht C., et al.
Published: (2004)

Investigation of corner radius using micro wire electro discharge machine
by: Sabur, Abdus, et al.
Published: (2011)

Micro electro discharge machining of non-conductive ceramic
by: Ali, Mohammad Yeakub, et al.
Published: (2018)

Micro electro discharge machining of non-conductive ceramic
by: Ali, M., et al.
Published: (2018)

Experimental determination of convective heat transfer coefficient in wire electro discharge machining
by: Nadiah Waznah, Zabidi
Published: (2008)

Electro-discharge machining for non-metal based fabrication process
by: Saleh, Tanveer
Published: (2015)

Precision multi-response optimization of performance characteristics in wire-cut electric discharge machining (WEDM) process / I. Nayak and J. Rana
by: Nayak, I., et al.
Published: (2020)

Micro wire electro discharge grinding: optimization of material removal rate and surface roughness
by: Ali, Mohammad Yeakub, et al.
Published: (2017)

High-precision dry micro-electro-discharge machining of Carbon-Nanotube forests with ultralow discharge energy
by: Saleh, Tanveer
Published: (2012)

Silicon carbide powder mixed micro electro discharge milling of titanium alloy
by: Ali, Mohammad Yeakub, et al.
Published: (2011)

Scratch Fracture of Polycrystalline Silicon Wafers
by: Borrero-Lõpez, O., et al.
Published: (2015)

Experimental laser-machining of silicon wafer
by: Lau, Zhen Chyen
Published: (2010)

Effect of machining parameters on surface textures in wire electro discharge machining of aisi 4140 steel
by: Nurul Shazwani, Mehat
Published: (2008)

Dedicated fixture design for polishing of silicon
by: Taufif, Zakaria
Published: (2008)

Near net shape machining by Micro-EDM and Micro-WEDM
by: Saleh, Tanveer, et al.
Published: (2019)

Micro electro discharge machining of non-conductive ceramic using conductive powder mix dielectric fluid
by: Ali, Mohammad Yeakub, et al.
Published: (2016)

Production, characterization and application of silicon-on-sapphire wafers
by: Pramanik, Alokesh, et al.
Published: (2010)

A novel electro conductive graphene/silicon-dioxide thermo-electric generator
by: Rahman, Mohammed Ataur, et al.
Published: (2017)

Analysis of silicon nanowires synthesized from SIO on silicon wafer substrate
by: Hamidinezhad, Habib, et al.
Published: (2009)

Etching performance of silicon wafers with redesigned etching drum
by: Dolah, Rozzeta
Published: (2006)

Ultrafiltration Treatment For Spent Tungsten Slurry Generated By Chemical Polishing Process In Wafer Fabrication Industry For Reuse
by: Sanusi, Nur Fatin Amalina Muhammad
Published: (2017)

Field-emission-assisted approach to dry micro-electro-discharge machining of carbon-nanotube forests
by: Saleh, Tanveer, et al.
Published: (2011)

Development of an active fixture for ultrasonically assisted micro electro-discharge machining
by: Mollik, Md Shohag, et al.
Published: (2019)

Micro Electro Discharge Milling for Microfabrication
by: Ali, Mohammad Yeakub, et al.
Published: (2005)

Dry micro-electro-discharge machining of carbon-nanotube forests using sulphur-hexafluoride
by: Saleh, Tanveer, et al.
Published: (2013)