Simulations of surface and bulk acoustic wave MEMS biosensors

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Simulations of surface and bulk acoustic wave MEMS biosensors

Traditionally a telecommunication device, the emerging application of acoustic wave devices as sensors is rapidly gaining attention due to its high sensitivities. In this work, a comparative study of surface (SAW) and bulk (BAW) acoustic wave biosensors is presented. The MEMS SAW resonator is formed...

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Bibliographic Details
Main Authors:	Jamil, Nadira, Nordin, Anis Nurashikin, Voiculescu, Ioana, Mel, Maizirwan
Format:	Proceeding Paper
Language:	English
Published:	2010
Subjects:	TK7885 Computer engineering
Online Access:	http://irep.iium.edu.my/3711/ http://irep.iium.edu.my/3711/1/11.pdf

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