Simulation of a MEMS piezoelectric energy harvester
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The des...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/1/3707.pdf |
| _version_ | 1848776204114460672 |
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| author | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim |
| author_facet | Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim |
| author_sort | Md Ralib @ Md Raghib, Aliza 'Aini |
| building | IIUM Repository |
| collection | Online Access |
| description | The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions. |
| first_indexed | 2025-11-14T14:26:22Z |
| format | Proceeding Paper |
| id | iium-3707 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T14:26:22Z |
| publishDate | 2010 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-37072016-03-17T02:49:14Z http://irep.iium.edu.my/3707/ Simulation of a MEMS piezoelectric energy harvester Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim TK7885 Computer engineering The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare #x00A9; to obtain the device at resonance frequency, output voltage and optimum dimensions. 2010-05 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/3707/1/3707.pdf Md Ralib @ Md Raghib, Aliza 'Aini and Nordin, Anis Nurashikin and Salleh, Hanim (2010) Simulation of a MEMS piezoelectric energy harvester. In: 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP 2010), 5-7 May 2010, Seville, Spain. http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5486470&tag=1 |
| spellingShingle | TK7885 Computer engineering Md Ralib @ Md Raghib, Aliza 'Aini Nordin, Anis Nurashikin Salleh, Hanim Simulation of a MEMS piezoelectric energy harvester |
| title | Simulation of a MEMS piezoelectric energy harvester |
| title_full | Simulation of a MEMS piezoelectric energy harvester |
| title_fullStr | Simulation of a MEMS piezoelectric energy harvester |
| title_full_unstemmed | Simulation of a MEMS piezoelectric energy harvester |
| title_short | Simulation of a MEMS piezoelectric energy harvester |
| title_sort | simulation of a mems piezoelectric energy harvester |
| topic | TK7885 Computer engineering |
| url | http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/ http://irep.iium.edu.my/3707/1/3707.pdf |