RF CMOS-MEMS cantilever resonator

This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...

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Main Authors: Zainuddin, Ahmad Anwar, Karim, Jamilah, Nordin, Anis Nurashikin, Taufik, Mohamad Syamsi, Pandian, Mohanraj, Khan, Sheroz
Format: Proceeding Paper
Language:English
Published: 2013
Subjects:
Online Access:http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/1/06717939.pdf
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author Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_facet Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
author_sort Zainuddin, Ahmad Anwar
building IIUM Repository
collection Online Access
description This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000.
first_indexed 2025-11-14T15:47:33Z
format Proceeding Paper
id iium-36871
institution International Islamic University Malaysia
institution_category Local University
language English
last_indexed 2025-11-14T15:47:33Z
publishDate 2013
recordtype eprints
repository_type Digital Repository
spelling iium-368712016-06-05T07:22:36Z http://irep.iium.edu.my/36871/ RF CMOS-MEMS cantilever resonator Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000. 2013-11 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/36871/1/06717939.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Taufik, Mohamad Syamsi and Pandian, Mohanraj and Khan, Sheroz (2013) RF CMOS-MEMS cantilever resonator. In: 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 26-27 Nov 2013, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939
spellingShingle TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Zainuddin, Ahmad Anwar
Karim, Jamilah
Nordin, Anis Nurashikin
Taufik, Mohamad Syamsi
Pandian, Mohanraj
Khan, Sheroz
RF CMOS-MEMS cantilever resonator
title RF CMOS-MEMS cantilever resonator
title_full RF CMOS-MEMS cantilever resonator
title_fullStr RF CMOS-MEMS cantilever resonator
title_full_unstemmed RF CMOS-MEMS cantilever resonator
title_short RF CMOS-MEMS cantilever resonator
title_sort rf cmos-mems cantilever resonator
topic TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
url http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/
http://irep.iium.edu.my/36871/1/06717939.pdf