RF CMOS-MEMS cantilever resonator
This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. Th...
| Main Authors: | , , , , , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/36871/ http://irep.iium.edu.my/36871/1/06717939.pdf |
| _version_ | 1848781311821479936 |
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| author | Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz |
| author_facet | Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz |
| author_sort | Zainuddin, Ahmad Anwar |
| building | IIUM Repository |
| collection | Online Access |
| description | This paper presents use of the simple cantilever
beam as RF CMOS-MEMS resonator, which can be scaled like
transistor with improved performance. This resonator can be
used in the oscillator and filter part of RF transceiver, which can
actually be fabricated on chip without losing its Q-factor. The
cantilever beam resonator was designed using COMSOL4.3b™
and produce resonance frequency at 10.2MHz, pull-in voltage at
1.5V and Q of 10000. |
| first_indexed | 2025-11-14T15:47:33Z |
| format | Proceeding Paper |
| id | iium-36871 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:47:33Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-368712016-06-05T07:22:36Z http://irep.iium.edu.my/36871/ RF CMOS-MEMS cantilever resonator Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices This paper presents use of the simple cantilever beam as RF CMOS-MEMS resonator, which can be scaled like transistor with improved performance. This resonator can be used in the oscillator and filter part of RF transceiver, which can actually be fabricated on chip without losing its Q-factor. The cantilever beam resonator was designed using COMSOL4.3b™ and produce resonance frequency at 10.2MHz, pull-in voltage at 1.5V and Q of 10000. 2013-11 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/36871/1/06717939.pdf Zainuddin, Ahmad Anwar and Karim, Jamilah and Nordin, Anis Nurashikin and Taufik, Mohamad Syamsi and Pandian, Mohanraj and Khan, Sheroz (2013) RF CMOS-MEMS cantilever resonator. In: 2013 IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 26-27 Nov 2013, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&arnumber=6717939 |
| spellingShingle | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices Zainuddin, Ahmad Anwar Karim, Jamilah Nordin, Anis Nurashikin Taufik, Mohamad Syamsi Pandian, Mohanraj Khan, Sheroz RF CMOS-MEMS cantilever resonator |
| title | RF CMOS-MEMS cantilever resonator |
| title_full | RF CMOS-MEMS cantilever resonator |
| title_fullStr | RF CMOS-MEMS cantilever resonator |
| title_full_unstemmed | RF CMOS-MEMS cantilever resonator |
| title_short | RF CMOS-MEMS cantilever resonator |
| title_sort | rf cmos-mems cantilever resonator |
| topic | TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices |
| url | http://irep.iium.edu.my/36871/ http://irep.iium.edu.my/36871/ http://irep.iium.edu.my/36871/1/06717939.pdf |