Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

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Design optimization of MEMS dual-leg shaped piezoresistive microcantilever

In this paper, an optimization on the mechanical behaviour of silicon piezoresistive microcantilever (PRM) has been carried out. Using CoventorWare 2008, the mechanical behavior of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The...

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Bibliographic Details
Main Authors:	Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sheik, Fareed
Format:	Proceeding Paper
Language:	English
Published:	2013
Subjects:	Q Science (General)
Online Access:	http://irep.iium.edu.my/34881/ http://irep.iium.edu.my/34881/1/IEEE_Published_RSM_2013.pdf

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