Design and optimization of a micro capacitive pressure sensor
The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to...
| Main Authors: | , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/32171/ http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf |
| _version_ | 1848780512459489280 |
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| author | Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah |
| author_facet | Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah |
| author_sort | Tahmasebpour, Kamyar |
| building | IIUM Repository |
| collection | Online Access |
| description | The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer. |
| first_indexed | 2025-11-14T15:34:51Z |
| format | Proceeding Paper |
| id | iium-32171 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T15:34:51Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-321712014-02-18T08:06:10Z http://irep.iium.edu.my/32171/ Design and optimization of a micro capacitive pressure sensor Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah TA165 Engineering instruments, meters, etc. Industrial instrumentation The shape of Micropressure sensors has influence on their accuracy. In this paper, a rectangular membrane type Micropressure sensor had been modeled using finite element package and shape optimization in order to design a more accurate flexible membrane. The results show that adding a slim wall, to protect the pressure sensor and system during pressure shocks, has a negligible effect on the membrane flexibility. Moreover, the simulation results show that the sensor exhibits a linear response with wide range of pressure from 0.01 MPa to 70 MPa. Furthermore, the simulation results yielded that the load-deflection responses could be enhanced using a spacer. 2013-07 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf application/pdf en http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf Tahmasebpour, Kamyar and Shobaki, Mohammed M. and Hrairi, Meftah (2013) Design and optimization of a micro capacitive pressure sensor. In: 2nd International Conference on Mechanical, Automotive and Aerospace Engineering (ICMAAE 2013), 2-4 July 2013, Kuala Lumpur, Malaysia. |
| spellingShingle | TA165 Engineering instruments, meters, etc. Industrial instrumentation Tahmasebpour, Kamyar Shobaki, Mohammed M. Hrairi, Meftah Design and optimization of a micro capacitive pressure sensor |
| title | Design and optimization of a micro capacitive pressure sensor |
| title_full | Design and optimization of a micro capacitive pressure sensor |
| title_fullStr | Design and optimization of a micro capacitive pressure sensor |
| title_full_unstemmed | Design and optimization of a micro capacitive pressure sensor |
| title_short | Design and optimization of a micro capacitive pressure sensor |
| title_sort | design and optimization of a micro capacitive pressure sensor |
| topic | TA165 Engineering instruments, meters, etc. Industrial instrumentation |
| url | http://irep.iium.edu.my/32171/ http://irep.iium.edu.my/32171/1/Paper_30177_-_Camera_ready.pdf http://irep.iium.edu.my/32171/4/Proceeding-CoverPage.pdf |