Design and modelling of silicon MEMS accelerometer

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Design and modelling of silicon MEMS accelerometer

In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...

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Bibliographic Details
Main Authors:	Hrairi, Meftah, Baharom, Badrul Hanafi
Format:	Article
Language:	English
Published:	Inderscience Publishers 2013
Subjects:	TJ181 Mechanical movements
Online Access:	http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf

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