Design and modelling of silicon MEMS accelerometer
In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, th...
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| Format: | Article |
| Language: | English |
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Inderscience Publishers
2013
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| Online Access: | http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf |
| _version_ | 1848780491580243968 |
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| author | Hrairi, Meftah Baharom, Badrul Hanafi |
| author_facet | Hrairi, Meftah Baharom, Badrul Hanafi |
| author_sort | Hrairi, Meftah |
| building | IIUM Repository |
| collection | Online Access |
| description | In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications. |
| first_indexed | 2025-11-14T15:34:31Z |
| format | Article |
| id | iium-32056 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:34:31Z |
| publishDate | 2013 |
| publisher | Inderscience Publishers |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-320562015-12-18T12:21:52Z http://irep.iium.edu.my/32056/ Design and modelling of silicon MEMS accelerometer Hrairi, Meftah Baharom, Badrul Hanafi TJ181 Mechanical movements In developing micro electro mechanical systems (MEMS), finite element analysis (FEA) is usually relied upon to study these micro-structures in determining stress, deformation, resonance, temperature distribution, electromagnetic interference, and electrical properties. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modelling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications. Inderscience Publishers 2013 Article PeerReviewed application/pdf en http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf Hrairi, Meftah and Baharom, Badrul Hanafi (2013) Design and modelling of silicon MEMS accelerometer. International Journal of Engineering Systems Modelling and Simulation, 5 (4). pp. 181-187. ISSN 1755-9766 http://www.inderscience.com/info/ingeneral/forthcoming.php?jcode=ijesms |
| spellingShingle | TJ181 Mechanical movements Hrairi, Meftah Baharom, Badrul Hanafi Design and modelling of silicon MEMS accelerometer |
| title | Design and modelling of silicon MEMS accelerometer |
| title_full | Design and modelling of silicon MEMS accelerometer |
| title_fullStr | Design and modelling of silicon MEMS accelerometer |
| title_full_unstemmed | Design and modelling of silicon MEMS accelerometer |
| title_short | Design and modelling of silicon MEMS accelerometer |
| title_sort | design and modelling of silicon mems accelerometer |
| topic | TJ181 Mechanical movements |
| url | http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/ http://irep.iium.edu.my/32056/1/IJESMS050403_HRAIRI.pdf |