A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

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A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor

We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...

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Bibliographic Details
Main Authors:	Faris, Waleed Fekry, Mohammed, Hazem
Format:	Proceeding Paper
Language:	English
Published:	2004
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf

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