A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor
We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the...
| Main Authors: | , |
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| Format: | Proceeding Paper |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf |
| _version_ | 1848780340868415488 |
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| author | Faris, Waleed Fekry Mohammed, Hazem |
| author_facet | Faris, Waleed Fekry Mohammed, Hazem |
| author_sort | Faris, Waleed Fekry |
| building | IIUM Repository |
| collection | Online Access |
| description | We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods |
| first_indexed | 2025-11-14T15:32:07Z |
| format | Proceeding Paper |
| id | iium-30772 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:32:07Z |
| publishDate | 2004 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-307722013-09-19T08:14:55Z http://irep.iium.edu.my/30772/ A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor Faris, Waleed Fekry Mohammed, Hazem TJ Mechanical engineering and machinery We formulated the problem of a capacitive pressure microsensor using linear plate model. Then, we solved the problem using two approaches; the first is analytical approach and the second is a reduced-order model using four-term Galerkin approximation employing polynomial expansion. We found that the pull-in value of the capacitance vary widely between the two approaches almost 40 percent increase in the second method. Also, central deflection at which the pull-in takes place is different between the two methods 2004 Proceeding Paper PeerReviewed application/pdf en http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf Faris, Waleed Fekry and Mohammed, Hazem (2004) A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor. In: 2004 IEEE International Conference on Semiconductor Electronics, 7-9 December 2004, Kuala Lumpur. http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=1620891&queryText%3DA+comparison+between+two+solution+approaches+for+diaphragmbased+capacitive+pressure+microsensor |
| spellingShingle | TJ Mechanical engineering and machinery Faris, Waleed Fekry Mohammed, Hazem A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title | A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title_full | A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title_fullStr | A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title_full_unstemmed | A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title_short | A comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| title_sort | comparison between two solution approaches for diaphragm-based capacitive pressure microsensor |
| topic | TJ Mechanical engineering and machinery |
| url | http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/ http://irep.iium.edu.my/30772/1/A_comparison_between_two.pdf |