High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator
A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high-power, normally-open switch based on micro-electro-mechanical systems (MEMS) technology. A shape-memory-alloy (SMA) cantilever is thermally actuated to enable switching between the...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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Wiley-VCH Verlag
2013
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/30324/ http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf |
| _version_ | 1848780276002455552 |
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| author | Dahmardeh, Masoud Mohamed Ali, Mohamed Sultan Saleh, Tanveer Min Hian, Tee Moghaddam, Mehran Vahdani Nojeh, Alireza Takahata, Kenichi |
| author_facet | Dahmardeh, Masoud Mohamed Ali, Mohamed Sultan Saleh, Tanveer Min Hian, Tee Moghaddam, Mehran Vahdani Nojeh, Alireza Takahata, Kenichi |
| author_sort | Dahmardeh, Masoud |
| building | IIUM Repository |
| collection | Online Access |
| description | A forest of vertically aligned carbon nanotubes (CNTs) is
integrated as an electrical contact material with a high-power,
normally-open switch based on micro-electro-mechanical
systems (MEMS) technology. A shape-memory-alloy (SMA)
cantilever is thermally actuated to enable switching between the
movable CNT forest and the copper electrode formed on the
SMA. The out-of-plane SMA actuator provides high forces to
enable distributed contacts with the CNT forest, achieving low
contact resistances and high ON/OFF resistance ratios. The ON
state of the switch shows contact resistances as low as 35Vwith
a dependence on the operating current. The device operation is
performed with over 5-W input powers. Long-term operation
with more than 1�106 switching cycles is demonstrated. The
results indicate that a combination of the CNT-based contact
and the SMA actuator may be a promising path to realizing
reliable MEMS contact switches for high-power applications. |
| first_indexed | 2025-11-14T15:31:05Z |
| format | Article |
| id | iium-30324 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T15:31:05Z |
| publishDate | 2013 |
| publisher | Wiley-VCH Verlag |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-303242013-08-28T04:46:01Z http://irep.iium.edu.my/30324/ High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator Dahmardeh, Masoud Mohamed Ali, Mohamed Sultan Saleh, Tanveer Min Hian, Tee Moghaddam, Mehran Vahdani Nojeh, Alireza Takahata, Kenichi TJ212 Control engineering A forest of vertically aligned carbon nanotubes (CNTs) is integrated as an electrical contact material with a high-power, normally-open switch based on micro-electro-mechanical systems (MEMS) technology. A shape-memory-alloy (SMA) cantilever is thermally actuated to enable switching between the movable CNT forest and the copper electrode formed on the SMA. The out-of-plane SMA actuator provides high forces to enable distributed contacts with the CNT forest, achieving low contact resistances and high ON/OFF resistance ratios. The ON state of the switch shows contact resistances as low as 35Vwith a dependence on the operating current. The device operation is performed with over 5-W input powers. Long-term operation with more than 1�106 switching cycles is demonstrated. The results indicate that a combination of the CNT-based contact and the SMA actuator may be a promising path to realizing reliable MEMS contact switches for high-power applications. Wiley-VCH Verlag 2013-04 Article PeerReviewed application/pdf en http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf Dahmardeh, Masoud and Mohamed Ali, Mohamed Sultan and Saleh, Tanveer and Min Hian, Tee and Moghaddam, Mehran Vahdani and Nojeh, Alireza and Takahata, Kenichi (2013) High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator. Physica Status Solidi (A) Applications and Materials, 210 (4). pp. 631-638. ISSN 1862-6300 http://onlinelibrary.wiley.com/doi/10.1002/pssa.201228678/abstract 10.1002/pssa.201228678 |
| spellingShingle | TJ212 Control engineering Dahmardeh, Masoud Mohamed Ali, Mohamed Sultan Saleh, Tanveer Min Hian, Tee Moghaddam, Mehran Vahdani Nojeh, Alireza Takahata, Kenichi High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title | High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title_full | High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title_fullStr | High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title_full_unstemmed | High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title_short | High-power MEMS switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| title_sort | high-power mems switch enabled by carbon-nanotube contact and shape-memory-alloy actuator |
| topic | TJ212 Control engineering |
| url | http://irep.iium.edu.my/30324/ http://irep.iium.edu.my/30324/ http://irep.iium.edu.my/30324/ http://irep.iium.edu.my/30324/1/SMA_Cantilever_Switch.pdf |