Diagonal control design for atomic force microscope piezoelectric tube nanopositioners

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Diagonal control design for atomic force microscope piezoelectric tube nanopositioners

Atomic Force Microscopes (AFM) are used for generating surface topography of samples at micro to atomic resolutions. Many commercial AFMs use piezoelectric tube nanopositioners for scanning. Scanning rates of these microscopes are hampered by the presence of low frequency resonant modes. When inadve...

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Bibliographic Details
Main Authors:	Bhikkaji, Bharath, Yong, Yuen Kuan, Mahmood, Iskandar Al-Thani, Moheimani, S.O. Reza
Format:	Article
Language:	English
Published:	American Institute of Physics (AIP) 2013
Subjects:	Q Science (General) TJ212 Control engineering
Online Access:	http://irep.iium.edu.my/29069/ http://irep.iium.edu.my/29069/1/Journal%23_RSI_Diagonal_control_design_for_atomic_force_microscope_piezoelectric_tube_nanopositioners.pdf

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